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[IEEE] Impact of In-Plane Residual Stress on The Performance of The Film Bulk Acoustic Resonators

tjpark Post time 2024-8-2 06:46:58 | Show all posts |Read mode
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journal£º2023 IEEE International Ultrasonics Symposium (IUS)

Authors£ºBhattacharya Shashwat; Chen Liu; Wenjia Yang; Ying Zhang; Xinghua Wang; Eugene Woo Yi Zhun; Yao Zhu

Published date£º2023-9-3

DOI£º10.1109/ius51837.2023.10306787

PDF link£ºhttps://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10306787

Article link£ºhttp://dx.doi.org/10.1109/ius51837.2023.10306787

Article Source£ºIEEE¡£


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