[IEEE] Characterization of Al and Ni-P Films as Hardmasks for the ICP-RIE Plasma Etching Bosch Process

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journal£ºJournal of Microelectromechanical Systems

Authors£ºCamila Sola Ruiz; Valter Salles do Nascimento; Clovis Fischer; Frederico Hummel Cioldin; Audrey Roberto Silva; Jose Alexandre Diniz

Published date£º2025-6-

DOI£º10.1109/jmems.2025.3535688

PDF link£ºhttps://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10970242

Article link£ºhttps://doi.org/10.1109/jmems.2025.3535688

Article Source£ºInstitute of Electrical and Electronics Engineers (IEEE)¡£


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mohannad92 Post time 2026-1-18 19:32:32 | Show all posts

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