Demonstration of crystalline IGZO transistor with high thermal stability for memory applications

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journal：2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)

Authors：Whayoung Kim; Jaehyeon Kim; Dongjin Ko; Jun-Hwe Cha; Gyeongcheol Park; Youngbae Ahn; Jong-Young Lee; Minchul Sung; Hyejung Choi; Seung Wook Ryu; Seiyon Kim; Myunghee Na; Seonyong Cha

Published date：2023-6-11

DOI：10.23919/vlsitechnologyandcir57934.2023.10185258

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10185258

Article link：https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185258

Article Source：IEEE。

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