[ACS] Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers

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journalㄩACS Applied Materials & Interfaces

AuthorsㄩAsif A. Shah; Gilles Delie; Petr A. Khomyakov; Jess Wellendorff; Olivier Richard; Seongho Park; Mayank Shrivastava; Hajdin Ceric; Houman Zahedmanesh

Published dateㄩ2026-4-15

DOIㄩ10.1021/acsami.6c03315

PDF linkㄩhttps://pubs.acs.org/doi/pdf/10.1021/acsami.6c03315

Article linkㄩhttps://doi.org/10.1021/acsami.6c03315

Article SourceㄩAmerican Chemical Society (ACS)﹝


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