[IOP] Gas dynamic-thermal-concentration fields and evaporation process of quartz particles in Ar每H2inductively coupled plasma

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journalㄩPlasma Sources Science and Technology

AuthorsㄩL Miao; Yu M Grishin

Published dateㄩ2020-6-1

DOIㄩ10.1088/1361-6595/ab8e4a

PDF linkㄩhttps://iopscience.iop.org/article/10.1088/1361-6595/ab8e4a

Article linkㄩhttps://doi.org/10.1088/1361-6595/ab8e4a

Article SourceㄩIOP Publishing﹝


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Gas dynamic-thermal-concentration fields and evaporation process of quartz particles in Ar每H2 inductively coupled plasma

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