[Other] Using Machine Learning Methods to Predict the Magnitude and the Direction of Mask Fragments Displacement in Optical Proximity Correction (OPC)

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journal：Optical Memory and Neural Networks

Authors：P. E. Tryasoguzov; A. V. Kuzovkov; I. M. Karandashev; G. S. Teplov

Published date：2021-10-

DOI：10.3103/s1060992x21040056

PDF link：https://link.springer.com/conten ... 060992X21040056.pdf

Article link：https://doi.org/10.3103/s1060992x21040056

Article Source：Allerton Press。

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[Other] Using Machine Learning Methods to Predict the Magnitude and the Direction of Mask Fragments Displacement in Optical Proximity Correction (OPC) Copy