[Other] Scallop Reduction in Bosch Process Using a Small Chamber and Rapid Gas Switching Rate

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journalㄩIEEJ Transactions on Sensors and Micromachines

AuthorsㄩHiroyuki Tanaka; Hisato Ogiso; Shizuka Nakano; Toshihiro Hayami; Toshiya Miyazaki; Sommawan Khumpuang; Shiro Hara

Published dateㄩ2016--

DOIㄩ10.1541/ieejsmas.136.499

PDF linkㄩhttps://www.jstage.jst.go.jp/article/ieejsmas/136/12/136_499/_pdf

Article linkㄩhttps://doi.org/10.1541/ieejsmas.136.499

Article SourceㄩInstitute of Electrical Engineers of Japan (IEE Japan)


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