[Elsevier] Influence of crystallite size and impurity density on the grain structure evolution of electroplated copper films during thermal and laser annealing

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journalㄩThin Solid Films

AuthorsㄩSilin Han; Chongyang Li; Yuhang Chen; Yunwen Wu; Ming Li; Tao Hang

Published dateㄩ2024-9-

DOIㄩ10.1016/j.tsf.2024.140514

PDF linkㄩhttps://www.sciencedirect.com/sc ... 040609024003158/pdf

Article linkㄩhttps://doi.org/10.1016/j.tsf.2024.140514

Article SourceㄩElsevier BV


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