[Elsevier] Anisotropy of Mist-CVD homoepitaxial growth on (010) and (001) 汕-Ga2O3 substrates

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journalㄩMaterials Science in Semiconductor Processing

AuthorsㄩJiahui Xie; Jiaqi Wei; Qi Li; Guangqing Li; Na Lin; Yang Li; Zhitai Jia; Xutang Tao; Min Zhang; Qiang Liu; Wenxiang Mu

Published dateㄩ2026-3-

DOIㄩ10.1016/j.mssp.2025.110159

PDF linkㄩhttps://www.sciencedirect.com/sc ... 369800125008972/pdf

Article linkㄩhttps://doi.org/10.1016/j.mssp.2025.110159

Article SourceㄩElsevier BV


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