[Elsevier] Material anisotropy-induced shape deviation of sliced sapphire wafers and its suppression in wire sawing

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journalㄩMaterials Science in Semiconductor Processing

AuthorsㄩMengran Ge; Chao Wang; Zongqiang Li; Wenbo Bi; Peiqi Ge; Peizhi Wang

Published dateㄩ2026-8-

DOIㄩ10.1016/j.mssp.2026.110701

PDF linkㄩhttps://www.sciencedirect.com/sc ... 369800126002970/pdf

Article linkㄩhttps://doi.org/10.1016/j.mssp.2026.110701

Article SourceㄩElsevier BV


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