[SPIE] Millimeter scale wafer shape control via a spin-on film

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journal：Advances in Patterning Materials and Processes XLIII

Authors：M. Murphy; C. Cutler; A. Weloth; J. Sitterly; D. Conklin

Published date：2026-4-9

DOI：10.1117/12.3090799

Article link：https://doi.org/10.1117/12.3090799

Article Source：SPIE。

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[SPIE] Millimeter scale wafer shape control via a spin-on film