[Elsevier] Electropolishing-enhanced corrosion resistance mechanisms of 316L stainless steel in semiconductor applications: Inclusion regulation, passive film optimization and aggressive microdroplet suppression

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journal:Corrosion Science

Authors:Chaoran Ma; Zhice Yang; Xi Zhuo Jiang; Peng Zhou; Yang Zhao; Yong Hua; Cheng Su; Tao Zhang; Fuhui Wang

Published date:2025-12-

DOI:10.1016/j.corsci.2025.113347

PDF link:https://www.sciencedirect.com/sc ... 010938X25006754/pdf

Article link:https://doi.org/10.1016/j.corsci.2025.113347

Article Source:Elsevier BV


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