[Elsevier] High-sensitivity, high-throughput inspection of nanoscale defects using a laser confocal positioning-assisted darkfield imaging system

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journalㄩOptics & Laser Technology

AuthorsㄩJiaqi Hu; Tao Liu; Peirui Ji; Guofeng Zhang; Yihong Huang; Chi Fai Cheung; Shuming Yang

Published dateㄩ2025-12-

DOIㄩ10.1016/j.optlastec.2025.113269

PDF linkㄩhttps://www.sciencedirect.com/sc ... 030399225008606/pdf

Article linkㄩhttps://doi.org/10.1016/j.optlastec.2025.113269

Article SourceㄩElsevier BV


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