Investigation of Parasitic Capacitance Effects in V-GAA Transistor via 3D PEX Methodology

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journal：2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)

Authors：Hong-Gang Liang; Yong Yu; De-Yuan Xiao; Jing-Fei Zhu; Jing Liang; Lan-Song Ba; Ji-Bin Leng; Zheng-Yong Zhu; Yong-Jie Li; Xing-Song Su; Kobe Weng; Li Bai; Yan-Zhe Tang; Hong-Bo Sun; Gui-Lei Wang; Hong-Wen Li; Wei-Feng Xu; Bryan Kang; Abraham Yoo; Kan-Yu Cao; Chao Zhao

Published date：2022-10-25

DOI：10.1109/icsict55466.2022.9963326

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=9963326

Article link：https://doi.org/10.1109/icsict55466.2022.9963326

Article Source：IEEE。

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