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[Other] The microstructure of sputter妻eposited coatings

LeoRosas Post time 3 day(s) ago | Show all posts |Read mode
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journalㄩJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

AuthorsㄩJohn A. Thornton

Published dateㄩ1986-11-

DOIㄩ10.1116/1.573628

PDF linkㄩhttp://avs.scitation.org/doi/pdf/10.1116/1.573628

Article linkㄩhttps://doi.org/10.1116/1.573628

Article SourceㄩAmerican Vacuum Society﹝


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