Structural Properties of GaN Thin Films Grown by RF Sputtering

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journal：2025 22nd International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE)

Authors：J. Cruz-Gómez; N.E. Vazquez-Barragan; L. A. Hernández-Hernández; Arturo Hernández-Hernández; J. Santos-Cruz; A. Guillén-Cervantes; M. de la L. Olvera; G. Contreras-Puente; F. de Moure-Flores

Published date：2025-10-22

DOI：10.1109/cce67728.2025.11271930

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=11271930

Article link：https://doi.org/10.1109/cce67728.2025.11271930

Article Source：IEEE。

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