[IOP] Etching of Ga2O3: an important process for device manufacturing

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journal：Journal of Physics D: Applied Physics

Authors：Zhaoying Xi; Zeng Liu; Junpeng Fang; Ang Bian; Shaohui Zhang; Jia-Han Zhang; Lei Li; Yufeng Guo; Weihua Tang

Published date：2024-12-13

DOI：10.1088/1361-6463/ad773d

PDF link：https://iopscience.iop.org/article/10.1088/1361-6463/ad773d

Article link：https://doi.org/10.1088/1361-6463/ad773d

Article Source：IOP Publishing。

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[IOP] Etching of Ga2O3: an important process for device manufacturing