[Elsevier] Nitrogen-enabled amorphous stabilization of high-mobility in-rich IGO via PEALD for uniform and reliable oxide TFTs

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journalㄩMaterials Today Electronics

AuthorsㄩYuJin Yang; Sang-Hyun Kim; Tae Heon Kim; Jeong-Su Song; Sun Myung Lee; Ki-Cheol Song; Yeonhee Lee; Yoon-Seo Kim; Jin-Seong Park

Published dateㄩ2026-6-

DOIㄩ10.1016/j.mtelec.2026.100215

PDF linkㄩhttps://www.sciencedirect.com/sc ... 772949426000203/pdf

Article linkㄩhttps://doi.org/10.1016/j.mtelec.2026.100215

Article SourceㄩElsevier BV


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