[Elsevier] Structure每property relationship of a magnetorheological elastomer polishing pad for single-crystal SiC and its magnetorheological polishing mechanism

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journalㄩMaterials Science in Semiconductor Processing

AuthorsㄩDa Hu; Kexin Liu; Huaian Yi; Enchi Xue; Jiabin Lu

Published dateㄩ2026-11-

DOIㄩ10.1016/j.mssp.2026.110945

PDF linkㄩhttps://www.sciencedirect.com/sc ... 36980012600541X/pdf

Article linkㄩhttps://doi.org/10.1016/j.mssp.2026.110945

Article SourceㄩElsevier BV


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