[Other] Comparison of Dry and Wet Etch Processes for Patterning SiO[sub 2]/TiO[sub 2] Distributed Bragg Reflectors for Vertical-Cavity Surface-Emitting Lasers

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journalㄩJournal of The Electrochemical Society

AuthorsㄩG. Dang; H. Cho; K. P. Ip; S. J. Pearton; S. N. G. Chu; J. Lopata; W. S. Hobson; L. M. F. Chirovsky; F. Ren

Published dateㄩ2001--

DOIㄩ10.1149/1.1337606

PDF linkㄩhttps://syndication.highwire.org/content/doi/10.1149/1.1337606

Article linkㄩhttps://doi.org/10.1149/1.1337606

Article SourceㄩThe Electrochemical Society


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