[Elsevier] Composition-controlled hafnium-based inorganic/organic hybrid dry photoresist via discrete feeding-molecular layer deposition

hyun6311 Post time 1 hour(s) ago | Show all posts |Read mode
This post will be closed automatically in 2026-07-17 06:57
Reward10points

journalㄩApplied Surface Science

AuthorsㄩKyungryul Ha; Dong Geun Kim; Hyekyung Kim; Ji-Hoon Ahn; Woo-Hee Kim; Tae Joo Park

Published dateㄩ2026-7-

DOIㄩ10.1016/j.apsusc.2026.166608

PDF linkㄩhttps://www.sciencedirect.com/sc ... 169433226008123/pdf

Article linkㄩhttps://doi.org/10.1016/j.apsusc.2026.166608

Article SourceㄩElsevier BV


Remarkㄩ

Best Answer

Please approve

View Full Content

Reply

Use magic Donate Report

All Reply1 Show all posts
ninibrindacier0 Post time 1 hour(s) ago | Show all posts

This post has been completed

Completed attachments will be deleted within 24 hours.
Reply

Use magic Donate Report

Return to the list