[Elsevier] Molecular layer deposition of tin-based organic每inorganic hybrid films as photoresists

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journalㄩApplied Surface Science

AuthorsㄩDong Geun Kim; Kyungryul Ha; Hyekyung Kim; Woo-Hee Kim; Tae Joo Park; Ji-Hoon Ahn

Published dateㄩ2025-4-

DOIㄩ10.1016/j.apsusc.2024.162240

PDF linkㄩhttps://www.sciencedirect.com/sc ... 16943322402960X/pdf

Article linkㄩhttps://doi.org/10.1016/j.apsusc.2024.162240

Article SourceㄩElsevier BV


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