[Other] Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas

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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩAdnan Mohammad; Krishna D. Joshi; Dhan Rana; Saidjafarzoda Ilhom; Barrett Wells; Brian Willis; Boris Sinkovic; A. K. Okyay; Necmi Biyikli

Published dateㄩ2023-5-1

DOIㄩ10.1116/6.0002383

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 405_1_6.0002383.pdf

Article linkㄩhttps://doi.org/10.1116/6.0002383

Article SourceㄩAmerican Vacuum Society


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