[Other] Damascene Copper Plating Recipe Engineering for Defectivity, Health of Line (HOL) and Reliability Improvement

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journalㄩECS Meeting Abstracts

AuthorsㄩShafaat Ahmed; Qiang Huang; Tien Jen Cheng; Paul Findeis; Dinesh R Koli; Connie Nga Troung; Stephan Grunow

Published dateㄩ2016-9-1

DOIㄩ10.1149/ma2016-02/29/1909

PDF linkㄩhttps://iopscience.iop.org/article/10.1149/MA2016-02/29/1909

Article linkㄩhttps://doi.org/10.1149/ma2016-02/29/1909

Article SourceㄩThe Electrochemical Society


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