[Other] Effects of ozone on physical and electrical properties of In每Ga每Zn每O film by thermal atomic layer deposition

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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩYongqing Shen; Xinlv Duan; Jinjuan Xiang; Zhengying Jiao; Liguo Chai; Xueli Ma; Yuting Chen; Di Geng; Guilei Wang; Chao Zhao

Published dateㄩ2025-3-1

DOIㄩ10.1116/6.0004355

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 411_1_6.0004355.pdf

Article linkㄩhttps://doi.org/10.1116/6.0004355

Article SourceㄩAmerican Vacuum Society


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