[OSA] Structured-illumination phase-derivative method for sub-diffraction-limit defect inspection

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journalㄩOptics Letters

AuthorsㄩJiating An; Lingbao Kong; Min Xu

Published dateㄩ2026-7-15

DOIㄩ10.1364/ol.600031

PDF linkㄩhttps://opg.optica.org/viewmedia.cfm?URI=ol-51-14-3850&seq=0

Article linkㄩhttps://doi.org/10.1364/ol.600031

Article SourceㄩOptica Publishing Group


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