[Other] THE INDUCTIVELY COUPLED RADIO FREQUENCY PLASMA

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journalㄩHigh Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)

AuthorsㄩMaher I. Boulos

Published dateㄩ1997--

DOIㄩ10.1615/hightempmatproc.v1.i1.20

PDF linkㄩhttps://dl.begellhouse.com/download/article/6ae2c99c4973bec7/HTMP 0101 (17-39).pdf

Article linkㄩhttps://doi.org/10.1615/hightempmatproc.v1.i1.20

Article SourceㄩBegell House


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