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[ACS] Synthesis, Characterization, and Electron-Beam Lithography of Tetakis(Triphenylstannyl) Orthosilicate and Tetrakis(Triacetoxystannyl) Orthosilicate for the Development of Inorganic Molecular EUV Resists

Sweetums33 Post time The day before yesterday 23:58 | Show all posts |Read mode
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journalㄩInorganic Chemistry

AuthorsㄩJiyoung Bang; Hyeok Yun; Soyeong Heo; Yusun Won; Seunghwan Kang; Hyuntae Jung; Hyun-Dam Jeong

Published dateㄩ2026-5-25

DOIㄩ10.1021/acs.inorgchem.6c00250

PDF linkㄩhttps://pubs.acs.org/doi/pdf/10.1021/acs.inorgchem.6c00250

Article linkㄩhttps://doi.org/10.1021/acs.inorgchem.6c00250

Article SourceㄩAmerican Chemical Society (ACS)﹝


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