[Elsevier] Fabrication of sub-50nm nanochannel array by an angle forming lift-off method

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journalㄩJournal of Manufacturing Processes

AuthorsㄩRan Guo; Liping Qi; Liang Xu; Helin Zou

Published dateㄩ2022-3-

DOIㄩ10.1016/j.jmapro.2022.01.034

PDF linkㄩhttps://www.sciencedirect.com/sc ... 526612522000512/pdf

Article linkㄩhttps://doi.org/10.1016/j.jmapro.2022.01.034

Article SourceㄩElsevier BV


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