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[Elsevier] Atomistic bonding and nanoscale separation mechanisms of plasma-activated and hydrated SiCN/SiCN dielectric interfaces for hybrid bonding

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journalㄩApplied Surface Science

AuthorsㄩDan Li; Zhiqiang Tian; Wenlan Zhou; Chang Ge; Xintong Wang; Zihan Tian; Shizhao Wang

Published dateㄩ2026-12-

DOIㄩ10.1016/j.apsusc.2026.167960

PDF linkㄩhttps://www.sciencedirect.com/sc ... 169433226021641/pdf

Article linkㄩhttps://doi.org/10.1016/j.apsusc.2026.167960

Article SourceㄩElsevier BV﹝


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