[Other] Tungsten Carbide Hard Mask Performance in Supervia and High Aspect Ratio Patterning for BEOL Advanced Interconnects

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journalㄩExtended Abstracts of the 2024 International Conference on Solid State Devices and Materials

AuthorsㄩDaniel Montero; Philippe Marien; Yannick Hermans; Fulya Ulu Okudur; Mattia Pasquali; Syamashree Roy; Chen Wu; Nunzio Buccheri; Victor Vega-Gonzalez; Harinarayanan Puliyalil; Quyang Lin; Gilberto Casillas; Jef Geypen; Alfonso Sepulveda; Frederic Lazzarino; Seongho Park; Zsolt Tokei

Published dateㄩ2024-9-2

DOIㄩ10.7567/ssdm.2024.c-1-04

Article linkㄩhttps://doi.org/10.7567/ssdm.2024.c-1-04

Article SourceㄩThe Japan Society of Applied Physics


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