[Elsevier] Reaction mechanisms of 汐,肋-bifunctional molecules toward atomic layer deposition versus molecular layer deposition

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journalㄩMaterials Chemistry and Physics

AuthorsㄩMiso Kim; Hongjun Oh; Bonggeun Shong

Published dateㄩ2024-5-

DOIㄩ10.1016/j.matchemphys.2024.129273

PDF linkㄩhttps://www.sciencedirect.com/sc ... 254058424003985/pdf

Article linkㄩhttps://doi.org/10.1016/j.matchemphys.2024.129273

Article SourceㄩElsevier BV


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