[Other] Atomic layer deposition of zinc oxide films on lateral high-aspect-ratio test structures using diethylzinc and water as precursors

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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩEero Haimi; Anish Philip; Jorge A. Velasco; Feng Gao; Maarit Karppinen; Riikka L. Puurunen

Published dateㄩ2026-3-1

DOIㄩ10.1116/6.0004982

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 410_1_6.0004982.pdf

Article linkㄩhttps://doi.org/10.1116/6.0004982

Article SourceㄩAmerican Vacuum Society


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