[Other] Electron-beam physical vapor deposition of diamond-like carbon coatings on Si substrates

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Edited by FatimaSabra at 2026-8-18 00:27

journal：AIP Conference Proceedings

Authors：Stanislava Rabadzhyiska; Georgi Kotlarski; Stefan Valkov; Maria Ormanova; Maria Shipochka; Peter Petrov

Published date：2022--

DOI：10.1063/5.0094838

PDF link：http://aip.scitation.org/doi/pdf/10.1063/5.0094838

Article link：https://doi.org/10.1063/5.0094838

Article Source：AIP Publishing。

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[Other] Electron-beam physical vapor deposition of diamond-like carbon coatings on Si substrates