2026-08-19 04:45:00 Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films - Article&Book-Science Hub 每 Free Research Papers | Academic Community

[Other] Pulsed chemical vapor deposition of cobalt and cobalt carbide thin films

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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩSen Chen; Xiangyu Zhang; Bowen Liu; Zhongwei Liu

Published dateㄩ2022-3-1

DOIㄩ10.1116/6.0001578

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 023401_1_online.pdf

Article linkㄩhttps://doi.org/10.1116/6.0001578

Article SourceㄩAmerican Vacuum Society


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