Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2Thin Films by Ozone Interface Oxidation

Post time The day before yesterday 16:51

journal：IEEE Electron Device Letters

Authors：Lu Tai; Wei Wei; Pengfei Jiang; Pengpeng Sang; Xiaopeng Li; Guoqing Zhao; Xiaoyu Dou; Xuepeng Zhan; Qing Luo; Jixuan Wu; Jiezhi Chen

Published date：2023-12-

DOI：10.1109/led.2023.3325426

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10287384

Article link：https://doi.org/10.1109/led.2023.3325426

Article Source：Institute of Electrical and Electronics Engineers (IEEE)。

Remark：

Post time The day before yesterday 16:51

: Waiting for confirmation
If the PDF has not been accepted after 72 hours, the system will automatically adopt it.

[IEEE] Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2Thin Films by Ozone Interface Oxidation

Same Category

Latest Reply

Announcement

Daily Top Contributors

[IEEE] Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2Thin Films by Ozone Interface Oxidation Copy

Same Category

Latest Reply

Announcement

Daily Top Contributors

[IEEE] Toward Low-Thermal-Budget Processing in Ferroelectric Hf0.5Zr0.5O2Thin Films by Ozone Interface Oxidation