[Other] GaN HEMT with improved electrical performance enabled by hybrid AlN nucleation layers

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journal：Applied Physics Letters

Authors：Bowei Yu; Haochen Zhang; Hongyu Liu; Jiayao Li; Fang Ye; Li Chen; Jun Tang; Shengli Qi; Zhibin Liu; Haiding Sun; Jichun Ye; Wei Guo

Published date：2026-3-2

DOI：10.1063/5.0300073

PDF link：https://pubs.aip.org/aip/apl/art ... 103_1_5.0300073.pdf

Article link：https://doi.org/10.1063/5.0300073

Article Source：AIP Publishing。

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[Other] GaN HEMT with improved electrical performance enabled by hybrid AlN nucleation layers