[Elsevier] Changes in edge shape during silicon wafer polishing: Roll-off and roll-up formation

yutong.zhang Post time 10 hour(s) ago | Show all posts |Read mode
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journalㄩCIRP Annals

AuthorsㄩUrara Satake; Toshiyuki Enomoto

Published dateㄩ2024--

DOIㄩ10.1016/j.cirp.2024.04.032

PDF linkㄩhttps://www.sciencedirect.com/sc ... 007850624000477/pdf

Article linkㄩhttps://doi.org/10.1016/j.cirp.2024.04.032

Article SourceㄩElsevier BV


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