[OSA] Decoupling of nanoindentation residual stress field in single-crystalline 4H-SiC via micro-Raman spectroscopy

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journal：Optics Letters

Authors：Zhoudong Yang; Jing Tian; Xinyue Wang; Junwei Chen; Yuanhui Zuo; Rongjun Zhang; Hongyu Tang; Xuejun Fan; Guoqi Zhang; Jiajie Fan

Published date：2025-6-1

DOI：10.1364/ol.563213

PDF link：https://opg.optica.org/viewmedia.cfm?URI=ol-50-11-3513&seq=0

Article link：https://doi.org/10.1364/ol.563213

Article Source：Optica Publishing Group。

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[OSA] Decoupling of nanoindentation residual stress field in single-crystalline 4H-SiC via micro-Raman spectroscopy