[Elsevier] [Single chapter]Characterization of surface processes during oxide CMP by in situ FTIR spectroscopy

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journalㄩAdvances in Chemical Mechanical Planarization (CMP)

AuthorsㄩU. K邦nzelmann; H. Schumacher-Hrtwig

Published dateㄩ2022--

DOIㄩ10.1016/b978-0-12-821791-7.00008-3

PDF linkㄩhttps://www.sciencedirect.com/sc ... 128217917000083/pdf

Article linkㄩhttps://doi.org/10.1016/b978-0-12-821791-7.00008-3

Article SourceㄩElsevier


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