[Other] Effect of Heater Structure on Oxygen Concentration in Large Diameter N-Type Czochralski Silicon Study Using Numerical Simulation

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AuthorsㄩLiang Zhao; Tai Li; Zhenling Huang; Xiang Zhou; Jiaming Kang; Wenhui Ma; Shaoyuan Li; Yongsheng Ren; Guoqiang Lv

Published dateㄩ--

DOIㄩ10.2139/ssrn.4611950

Article linkㄩhttps://doi.org/10.2139/ssrn.4611950

Article SourceㄩElsevier BV


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