[Other] Bonding of LiNbO3and Si wafers at room temperature using Si nanolayers

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journalㄩJapanese Journal of Applied Physics

AuthorsㄩKaname Watanabe; Jun Utsumi; Ryo Takigawa

Published dateㄩ2021-6-1

DOIㄩ10.35848/1347-4065/abf2d3

PDF linkㄩhttps://iopscience.iop.org/article/10.35848/1347-4065/abf2d3

Article linkㄩhttps://doi.org/10.35848/1347-4065/abf2d3

Article SourceㄩIOP Publishing


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