[Other] Study of Carbon in Thermal Oxide Formed on 4H-SiC by XPS

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journalㄩMaterials Science Forum

AuthorsㄩP. Zhao; E. Rusli; Jun Hai Xia; Chung Ming Tan; Y. Liu; Chin Che Tin; S.F. Yoon; Weiguang Zhu; J. Ahn

Published dateㄩ--

DOIㄩ10.4028/0-87849-963-6.653

Article linkㄩhttps://doi.org/10.4028/0-87849-963-6.653

Article SourceㄩTrans Tech Publications Ltd.


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