[Other] Size effect of resistivity due to surface roughness scattering in alternative interconnect metals: Cu,Co, Ru, and Mo

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journalㄩPhysical Review B

AuthorsㄩChaoyu Hu; Yu Zhang; Zhiyi Chen; Qingyun Zhang; Jianjun Zhu; Shaojian Hu; Youqi Ke

Published dateㄩ--

DOIㄩ10.1103/physrevb.107.195422

PDF linkㄩhttps://link.aps.org/article/10.1103/PhysRevB.107.195422

Article linkㄩhttps://doi.org/10.1103/physrevb.107.195422

Article SourceㄩAmerican Physical Society (APS)


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