[Other] Recent trends in thermal atomic layer deposition chemistry

Joey994 Post time Yesterday 16:05 | Show all posts |Read mode
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journalㄩJournal of Vacuum Science & Technology A

AuthorsㄩGeorgi Popov; Miika Mattinen; Anton Vihervaara; Markku Leskel

Published dateㄩ2025-5-1

DOIㄩ10.1116/6.0004320

PDF linkㄩhttps://pubs.aip.org/avs/jva/art ... 801_1_6.0004320.pdf

Article linkㄩhttps://doi.org/10.1116/6.0004320

Article SourceㄩAmerican Vacuum Society


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