[Elsevier] Process optimization of titanium self-aligned silicide formation through evaluation of sheet resistance by design of experiment methodology

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journalㄩSolid-State Electronics

AuthorsㄩIn-Chi Gau; Yao-Wen Chang; Giin-Shan Chen; Yi-Lung Cheng; Jau-Shiung Fang

Published dateㄩ2024-5-
DOIㄩ10.1016/j.sse.2024.108879

PDF linkㄩhttps://www.sciencedirect.com/sc ... 038110124000285/pdf

Article linkㄩhttps://doi.org/10.1016/j.sse.2024.108879

Article SourceㄩElsevier BV


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