[IEEE] Design and Implementation of CMOS-MEMS Schottky Gas Sensor With Asymmetric Metal Contacts for Performance Enhancement at Room Temperature

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journal:IEEE Sensors Journal

Authors:Thu Thi Do; Yung-Chen Li; Quynh Thi Le; Yu-Lun Chueh; Weileun Fang

Published date:2025-4-15

DOI:10.1109/jsen.2025.3544690

PDF link:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10909168

Article link:https://doi.org/10.1109/jsen.2025.3544690

Article Source:Institute of Electrical and Electronics Engineers (IEEE)


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