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[IEEE] AI Computational Lithography

nami.jami.hsh.s Post time 5 day(s) ago | Show all posts |Read mode
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journal：2020 China Semiconductor Technology International Conference (CSTIC)

Authors：Xuelong Shi; Yuhang Zhao; Shoumian Chen; Chen Li

Published date：2020-6-26

DOI：10.1109/cstic49141.2020.9282529

PDF link：https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=9282529

Article link：https://doi.org/10.1109/cstic49141.2020.9282529

Article Source：IEEE。


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