[IEEE] A Flexible Film Bulk Acoustic Resonator Radio Frequency Sensor Based on Pb1.2(Zr0.52Ti0.48)O3/Polymer Thin Films

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journal:IEEE Sensors Journal

Authors:Tianyu Wei; Bo Dong; Yuxuan Hu; Pofeng Lin; Wobin Huang

Published date:2024-12-1

DOI:10.1109/jsen.2024.3467374

PDF link:https://ieeexplore.ieee.org/stampPDF/getPDF.jsp?arnumber=10713877

Article link:https://doi.org/10.1109/jsen.2024.3467374

Article Source:Institute of Electrical and Electronics Engineers (IEEE)


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