[Elsevier] Circular cross-sectional and polarization-independent microchannels in glass via low-pulse-overlap femtosecond laser induced selective etching

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journal:Journal of Manufacturing Processes

Authors:Yuanxin Tan; Huaiyi Luo; Gaozhan Jiang; Zongcheng Mou; Yingying Ren; Mingchuan Shao; Cong Zhang; Yangjian Cai; Ya Cheng

Published date:2026-10-

DOI:10.1016/j.jmapro.2026.08.076

PDF link:https://www.sciencedirect.com/sc ... 526612526008327/pdf

Article link:https://doi.org/10.1016/j.jmapro.2026.08.076

Article Source:Elsevier BV


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